Low Temperature Conductive Aluminum Doped Zinc Oxide for Solar Cell Applications Using Atomic Layer Deposition

  • Muhaira Al Eghfeli

Student thesis: Master's Thesis


Ongoing and fast developments in the semiconductor industry can be used to facilitate research of alternative sustainable energy sources. For example, solar cells can be used to generate energy without the emission of greenhouse gases associated with the use of fossil fuels. Efforts to achieve the highest possible energy conversion have been a driving force in solar research for a long time. The materials trend for solar cells has been from Amorphous-Si, to microcrystalline–Si, and now to large grain polycrystalline-Si. Anti-reflective coating (ARC) has been utilized in solar cell structures to reduce light reflection. Several materials, such as Indium Tin Oxide (ITO), Silicon Dioxide (SiO2), and Silicon Nitride (SiNx) have been studied and practically applied. However, to reduce the overall cost of solar cells, low-cost ARC materials are required. Zinc Oxide (ZnO) has emerged as an inexpensive material that possesses the proper optical properties for ARC applications. The research in this thesis is focused on a new ARC material, ZnO, and TCAD simulation and Atomic Layer Deposition (ALD) growth are used to demonstrate the ZnO ARC.
Date of AwardDec 2016
Original languageAmerican English
SupervisorAmmar Nayfeh (Supervisor)


  • Semiconductor Industry
  • Sustainable Energy
  • Solar Cells
  • Greenhouse Gas
  • Fossil Fuels
  • Amorphous-Si
  • Microcrystalline–Si
  • Polycrystalline-Si
  • Indium Tin Oxide
  • Silicon Dioxide
  • Silicon Nitride
  • Anti-reflective coating
  • Zinc Oxide
  • Atomic Layer Deposition.

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