Dynamic Analysis of Straight Micro Beam for Gas and Temperature Sensing Applications

Abstract

Microresonators have emerged as crucial components in sensing applications due to their unique linear and nonlinear dynamics. In recent years, microresonators have gained significant attention in the field of sensing due to their ability to confine light within a small volume, resulting in strong light-matter interactions. The linear dynamic behavior of microresonators, characterized by their resonant frequencies and quality factors, allows for precise sensing of external perturbations. By monitoring the changes in resonance frequency or quality factor, microresonators can detect variations in temperature, pressure, gas concentration, refractive index, and other physical quantities with remarkable sensitivity. Microresonator-based sensors have demonstrated exceptional performance in various fields, including environmental monitoring, biomedical sensing, chemical detection, and telecommunications. These sensors have desirable characteristics including scalability, low consumed power, and high sensitivity and selectivity. Consequently, they are optimal choice for developing compact and portable sensors. The study presented in this thesis is based on reduced order model of nonlinear Euler Bernoulli beam theory for clamped-clamped straight micro-beam. The primary objective of the analytical model is to function as gas and temperature sensor. The gas sensing aspect of the study is validated though comparison between the analytical model and the previous work, while the temperature sensing investigation focuses on the theoretical analysis of the sensor’s capabilities. Furthermore, the thesis explores the crossing and veering phenomena in the linear dynamic, as well as internal resonance in the nonlinear dynamic. The gas sensor is tested for CO2 and CH4, and its sensitivity is enhanced using Lorentz force. By leveraging the dynamic properties of microresonators, highly sensitive and accurate sensors can be developed, further advancing the capabilities of sensing technology. Ongoing research in this area holds tremendous promise for the utilization of microresonators as sensors, with the potential to revolutionize industries and improve the quality of life.

Date of Award	24 May 2024
Original language	American English
Supervisor	Alcheikh ep Allouch (Supervisor)