Abstract
An n-type zinc oxide (ZnO) nanowires and p-type silicon heterojunction has been successfully constructed to demonstrate UV (ultra-violet) photodiodes. The prototype device consists of unintentionally doped n-type ZnO nanowires in the range of 70-120 nanometers in diameter synthesized by the bottom-up vapor-liquid-solid growth process. The nanowires are grown on top of a (100) p-silicon substrate with a doping level of ∼1018 cm-3 to form the heterojunction. The isolation is achieved by using spin-on glass (SOG) that also works as the foundation of the top electrode. The current-voltage characteristics show the typical rectifying behavior of heterojunctions, and the photodiode exhibits response of 0.07 A/W for UV light (365 nm) under a 20V reverse bias.
| Original language | British English |
|---|---|
| Article number | TPb1 |
| Pages (from-to) | 427-430 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| State | Published - 2005 |
| Event | 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States Duration: 30 Jan 2005 → 3 Feb 2005 |
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