@inproceedings{0c9393b9741e46eb82d0014a09b651da,
title = "Variation-aware modelling of micro-scale piezoelectric energy harvesters",
abstract = "The inherent tolerances in MEMS fabrication processes introduce variability that causes the device performance to deviate systematically from its designed values. In this work, we have used Monte-Carlo (MC) simulation to propagate process variability through a piezoelectric energy harvester (PEH) finite element model (FEM) and its extracted equivalent circuit model (ECM) to discover the uncertainty models of its performance metrics, such as optimal power and resonance frequency and its ECM parameters. Characterization results of a set of fabricated PEH devices were compared against the MC-derived uncertainty models to explain the statistical spread.",
author = "Syed, {Wajih U.} and Alabi Bojesomo and Elfadel, {Ibrahim M.}",
note = "Funding Information: ACKNOWLEDGEMENTS This work is funded by the Mubadala Investment Company -Abu Dhabi, Economic Development Board - Singapore, and GLOBALFOUNDRIES - Singapore under the frame-work of the MEMS TwinLab program with participation of the A*STAR Institute of Microelectronics– Singapore (IME), Masdar Institute at Khalifa University - Abu Dhabi, and GLOBALFOUNDRIES - Singapore. Publisher Copyright: {\textcopyright} 2018 IEEE.; 20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018 ; Conference date: 22-05-2018 Through 25-05-2018",
year = "2018",
month = jun,
day = "22",
doi = "10.1109/DTIP.2018.8394184",
language = "British English",
series = "Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1--4",
editor = "Romolo Marcelli and Yoshio Mita and Stewart Smith and Francis Pressecq and Pascal Nouet and Frederick Mailly and Peter Schneider",
booktitle = "Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018",
address = "United States",
}