@inproceedings{fb05fa01c6614f748229b729aa8fd7f4,
title = "Ultra-Sensitive Resonant Low-Medium Vacuum Pressure Micro-Sensor",
abstract = "We report an ultra-sensitive pressure sensor by electrothermally exciting and tracking the frequency shift of the first two symmetric/anti-symmetric resonant modes of a V-shaped multi-stepped micro-beam, which is operated near the frequency veering (avoided-crossing) zone. Operating in the low-medium vacuum pressure range and with low power consumption around 0.7 μW, the micro-sensor achieves an ultra-sensitivity of 385320 ppm/Torr, which is very high compared to other reported pressure sensors. In addition, the facts that it does not rely on big diaphragms, and its potential for further significant miniaturization make it promising for many practical applications.",
keywords = "high sensitivity, low power, Resonant pressure sensors, veering phenomenon",
author = "Nouha Alcheikh and Mbarek, \{Sofiane Ben\} and Younis, \{Mohammad I.\}",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 ; Conference date: 21-01-2024 Through 25-01-2024",
year = "2024",
doi = "10.1109/MEMS58180.2024.10439345",
language = "British English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "797--800",
booktitle = "IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024",
address = "United States",
}