Thermal losses and temperature measurement in SOI MEMS heater

Nicholas Moelders; Irina Puscasu; Mark P. McNeal; Martin U. Pralle; Lisa Last; William Ho; Anton C. Greenwald; James T. Daly; Edward A. Johnson; Thomas George; Daniel S. Choi

Thermal losses and temperature measurement in SOI MEMS heater

Nicholas Moelders, Irina Puscasu, Mark P. McNeal, Martin U. Pralle, Lisa Last, William Ho, Anton C. Greenwald, James T. Daly, Edward A. Johnson, Thomas George, Daniel S. Choi

Mechanical & Nuclear Engineering

Ion Optics Inc

Research output: Contribution to journal › Article › peer-review

Abstract

A sensor chip has been designed and tested that uses a MEMS strip heater as both source and detector of infrared radiation. An optical cavity reflects infrared radiation back onto the source filament. Changes in reflected light intensity modify heater temperature, and the measured signal is a change in resistance. The effects of processing on electrical and thermal isolation were characterized and used to evaluate device performance. Thermally isolated, uniformly heated emitters are achieved using a backside release etch process. The fully released devices demonstrated superior electric to thermal-optical conversion, with the requisite narrow band emission for CO₂ detection. Using these sensor-chips, CO₂ detection was demonstrated, with projected sensitivities ≤0.1%.

Original language	British English
Pages (from-to)	155-160
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	687
State	Published - 2002

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Cite this

@article{0129484e740846a78393aeaa26a144ca,

title = "Thermal losses and temperature measurement in SOI MEMS heater",

abstract = "A sensor chip has been designed and tested that uses a MEMS strip heater as both source and detector of infrared radiation. An optical cavity reflects infrared radiation back onto the source filament. Changes in reflected light intensity modify heater temperature, and the measured signal is a change in resistance. The effects of processing on electrical and thermal isolation were characterized and used to evaluate device performance. Thermally isolated, uniformly heated emitters are achieved using a backside release etch process. The fully released devices demonstrated superior electric to thermal-optical conversion, with the requisite narrow band emission for CO2 detection. Using these sensor-chips, CO2 detection was demonstrated, with projected sensitivities ≤0.1%.",

author = "Nicholas Moelders and Irina Puscasu and McNeal, {Mark P.} and Pralle, {Martin U.} and Lisa Last and William Ho and Greenwald, {Anton C.} and Daly, {James T.} and Johnson, {Edward A.} and Thomas George and Choi, {Daniel S.}",

year = "2002",

language = "British English",

volume = "687",

pages = "155--160",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

}

TY - JOUR

T1 - Thermal losses and temperature measurement in SOI MEMS heater

AU - Moelders, Nicholas

AU - Puscasu, Irina

AU - McNeal, Mark P.

AU - Pralle, Martin U.

AU - Last, Lisa

AU - Ho, William

AU - Greenwald, Anton C.

AU - Daly, James T.

AU - Johnson, Edward A.

AU - George, Thomas

AU - Choi, Daniel S.

PY - 2002

Y1 - 2002

N2 - A sensor chip has been designed and tested that uses a MEMS strip heater as both source and detector of infrared radiation. An optical cavity reflects infrared radiation back onto the source filament. Changes in reflected light intensity modify heater temperature, and the measured signal is a change in resistance. The effects of processing on electrical and thermal isolation were characterized and used to evaluate device performance. Thermally isolated, uniformly heated emitters are achieved using a backside release etch process. The fully released devices demonstrated superior electric to thermal-optical conversion, with the requisite narrow band emission for CO2 detection. Using these sensor-chips, CO2 detection was demonstrated, with projected sensitivities ≤0.1%.

AB - A sensor chip has been designed and tested that uses a MEMS strip heater as both source and detector of infrared radiation. An optical cavity reflects infrared radiation back onto the source filament. Changes in reflected light intensity modify heater temperature, and the measured signal is a change in resistance. The effects of processing on electrical and thermal isolation were characterized and used to evaluate device performance. Thermally isolated, uniformly heated emitters are achieved using a backside release etch process. The fully released devices demonstrated superior electric to thermal-optical conversion, with the requisite narrow band emission for CO2 detection. Using these sensor-chips, CO2 detection was demonstrated, with projected sensitivities ≤0.1%.

UR - http://www.scopus.com/inward/record.url?scp=0036350173&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0036350173

SN - 0272-9172

VL - 687

SP - 155

EP - 160

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

ER -

Thermal losses and temperature measurement in SOI MEMS heater

Abstract

UN SDGs

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