@inproceedings{27bb1f800d91462b9593fff3651ee054,
title = "Subwavelength grating waveguide-integrated athermal Mach-Zehnder interferometer with enhanced fabrication error tolerance and wide stable spectral range",
abstract = "We propose an athermal Mach-Zehnder interferometer (MZI) with a subwavelength grating waveguide implemented in one of the arms to increase its fabrication error tolerance. The design is demonstrated with a CMOS compatible fabrication. In this work we will discuss the design principles of the subwavelength grating, loss mechanism, fabrication procedure and experimental results obtained. The fabricated devices have a temperature sensitivity of less than 10 pm/K over a spectral range from 1.5μm to 1.64μm. Also, the fabricated devices have a stable performance within the aforementioned specifications even with fabrication linewidth variations from -20 nm to 40 nm.",
keywords = "Integrated optics devices; Wavelength filtering devices; Temperature; Waveguides; Gratings",
author = "Peng Xing and Jaime Viegas",
note = "Publisher Copyright: COPYRIGHT {\textcopyright} SPIE.; Silicon Photonics XI ; Conference date: 15-02-2016 Through 17-02-2016",
year = "2016",
doi = "10.1117/12.2214101",
language = "British English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Reed, {Graham T.} and Knights, {Andrew P.}",
booktitle = "Silicon Photonics XI",
address = "United States",
}