Six-degree-of-freedom micro-manipulator based on piezoelectric translators

Peng Gao, Shan Min Swei

Research output: Contribution to journalArticlepeer-review

65 Scopus citations

Abstract

High-performance actuation is always desirable in a dexterous high-precision manipulation system. In this paper, we first develop a single-degree-of-freedom piezoelectric translator composed of a piezoelectric stack, a monolithic leaf spring and a preload mechanism. The displacement resolution reached by this translator is better than 10 nm, while its natural frequency is over 2 kHz. Based on the developed piezoelectric translator, a micro-manipulator is then designed, which is capable of producing micro-motions in six degrees of freedom. The design characteristics and kinematics of this micro-manipulator are investigated. An effective kinematic model used for the real-time control is presented, and the operation performance of the micro-manipulator is discussed further.

Original languageBritish English
Pages (from-to)447-452
Number of pages6
JournalNanotechnology
Volume10
Issue number4
DOIs
StatePublished - Dec 1999

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