Simulation of infrared picosecond laser-induced electron emission from semiconductors

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Abstract

In this study, we present a self-consistent model for picosecond laser induced electron emission from silicon. Surface electron emission due to a pulsed laser excitation originates from thermionic and photoelectric effects, both of which depend on the surface electron temperature and incident laser pulse intensity. By numerically solving a set of coupled transport equations, time dependent surface electron temperature as well as lattice temperature was determined. The electron emission rates and electron yields due to photoelectric and thermionic effects have been studied for varying pulse width and pulse intensity. For picosecond pulses at 1064 nm, the dominant emission mechanism was found to be photoelectric emission for pulse fluences below the melting threshold. In addition, a comparison between electron emission due to the picosecond infrared pulse and a picosecond 532 nm pulse was also presented.

Original languageBritish English
Pages (from-to)206-211
Number of pages6
JournalApplied Surface Science
Volume127-129
DOIs
StatePublished - May 1998

Keywords

  • Infrared picosecond laser-induced electron emission
  • Semiconductors
  • Silicon

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