Simulation of argon-excited microwave plasma reactor for green energy and CO₂ conversion application

Microwave plasma as a potential tool to convert CO₂ has been extensively studied in recent years. A simulated study on the plasma parameters via the variation of the operating pressure of a microwave plasma model has been performed in this study. The establishment of the model was based on the finite element method to analyse the spatial distribution of plasma parameters in the plasma torch over a period of time. Plasma parameters such as electron potential, density, and temperature were investigated at three different pressures, and the growth of electron potential and density were associated with time. The distribution of molecular ions was observed to be located more on the enter port of the microwave or waveguide near the location of the magnetron at the initial stage. The electron density was found to be constant after it reached maximum value for all the determined pressures. However, the electron temperature behaved differently as compared to the electron potential and density, the distribution of high electron temperature did not enhance during the processing time. The analysis of microwave plasma parameters is beneficial for plasma reactor designing, particularly for CO₂ conversion.