Silicon nanocrystal formation in annealed silicon-rich silicon oxide films prepared by plasma enhanced chemical vapor deposition

N. Daldosso, G. Das, S. Larcheri, G. Mariotto, G. Dalba, L. Pavesi, A. Irrera, F. Priolo, F. Iacona, F. Rocca

Research output: Contribution to journalArticlepeer-review

81 Scopus citations

Fingerprint

Dive into the research topics of 'Silicon nanocrystal formation in annealed silicon-rich silicon oxide films prepared by plasma enhanced chemical vapor deposition'. Together they form a unique fingerprint.

Engineering

Physics

Material Science