Revealing microstructure and dislocation behavior in BAlN/AlGaN heterostructures

Haiding Sun, Feng Wu, Young Jae Park, T. M. Al tahtamouni, Che Hao Liao, Wenzhe Guo, Nasir Alfaraj, Kuang Hui Li, Dalaver H. Anjum, Theeradetch Detchprohm, Russell D. Dupuis, Xiaohang Li

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Abstract

We reveal the microstructure and dislocation behavior in 20-pair B0.14Al0.86N/Al0.70Ga0.30N multiple-stack heterostructures (MSHs) exhibiting an increasing dislocation density along the c-axis, which is attributed to the continuous generation of dislocations (edge and mixed-type) within the individual B0.14Al0.86N layers. At the MSH interfaces, the threading dislocations were accompanied by a string of V-shape pits extending to the surface, leading to interface roughening and the formation of surface columnar features. Strain maps indicated an approximately 1.5% tensile strain and 1% compressive strain in the B0.14Al0.86N and Al0.70Ga0.30N layers, respectively. Twin structures were observed, and the MSH eventually changed from monocrystalline to polycrystalline.

Original languageBritish English
Article number011001
JournalApplied Physics Express
Volume11
Issue number1
DOIs
StatePublished - Jan 2018

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