Resonator-Based Bidirectional Lorentz Force Magnetic Sensor

Nouha Alcheikh, Mohammad I. Younis

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

We present a low power high sensitive in-plane resonant bidirectional Lorentz-force magnetic micro-sensor operating in air at ambient pressure. The concept is based on the detection of the resonance frequency shift of an electrothermally straight micro-beam resonator operated near the buckling point. Powered at 20 mu text{W} , the micro-sensor shows a measured sensitivity (S) of 3.32/(mA.T), which is very high compared to the state of the art. The proposed method is simple in design making it promising for achieving practical low-cost magnetometer.

Original languageBritish English
Article number9343302
Pages (from-to)406-409
Number of pages4
JournalIEEE Electron Device Letters
Volume42
Issue number3
DOIs
StatePublished - Mar 2021

Keywords

  • Bidirectional magnetic sensors
  • buckling point
  • high sensitivity
  • low power

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