Abstract
We present a low power high sensitive in-plane resonant bidirectional Lorentz-force magnetic micro-sensor operating in air at ambient pressure. The concept is based on the detection of the resonance frequency shift of an electrothermally straight micro-beam resonator operated near the buckling point. Powered at 20 mu text{W} , the micro-sensor shows a measured sensitivity (S) of 3.32/(mA.T), which is very high compared to the state of the art. The proposed method is simple in design making it promising for achieving practical low-cost magnetometer.
Original language | British English |
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Article number | 9343302 |
Pages (from-to) | 406-409 |
Number of pages | 4 |
Journal | IEEE Electron Device Letters |
Volume | 42 |
Issue number | 3 |
DOIs | |
State | Published - Mar 2021 |
Keywords
- Bidirectional magnetic sensors
- buckling point
- high sensitivity
- low power