Resistive switching characteristics of tantalum oxide and titanium oxide heterojunction devices

Haider Abbas, Yawar Abbas, Mi Ra Park, Quanli Hu, Tae Sung Lee, Jongweon Cho, Tae Sik Yoon, Young Jin Choi, Chi Jung Kang

    Research output: Contribution to journalArticlepeer-review

    10 Scopus citations

    Abstract

    In this study, single-layer and trilayer devices with Pt/Ti/TaO2/Pt and Pt/Ti/TiOx/TaO2/TiOx/Pt structures were fabricated. For the trilayer device, a tantalum oxide thin film was sandwiched between the titanium oxide thin films. The thickness of the tantalum oxide in the single-layer device was ∼20 nm. The total trilayer oxide thickness was ~17.5 nm. The trilayer heterojunction device exhibited very stable bipolar resistive switching, which could be caused by the formation and rupture of the conducting filaments (CFs) in the oxide switching layers. The trilayer device showed better endurance and retention characteristics and low SET and RESET voltages, with very small variations. The conduction mechanisms of ohmic conduction, space-charge-limited conduction, Poole-Frenkel emission, and Schottky conduction have been investigated as the possible conduction mechanisms for the resistive switching of the devices.

    Original languageBritish English
    Pages (from-to)7150-7154
    Number of pages5
    JournalJournal of Nanoscience and Nanotechnology
    Volume17
    Issue number10
    DOIs
    StatePublished - Oct 2017

    Keywords

    • Resistive Switching
    • RRAM
    • Tantalum Oxide
    • Titanium Oxide

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