Abstract
In this study, single-layer and trilayer devices with Pt/Ti/TaO2/Pt and Pt/Ti/TiOx/TaO2/TiOx/Pt structures were fabricated. For the trilayer device, a tantalum oxide thin film was sandwiched between the titanium oxide thin films. The thickness of the tantalum oxide in the single-layer device was ∼20 nm. The total trilayer oxide thickness was ~17.5 nm. The trilayer heterojunction device exhibited very stable bipolar resistive switching, which could be caused by the formation and rupture of the conducting filaments (CFs) in the oxide switching layers. The trilayer device showed better endurance and retention characteristics and low SET and RESET voltages, with very small variations. The conduction mechanisms of ohmic conduction, space-charge-limited conduction, Poole-Frenkel emission, and Schottky conduction have been investigated as the possible conduction mechanisms for the resistive switching of the devices.
Original language | British English |
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Pages (from-to) | 7150-7154 |
Number of pages | 5 |
Journal | Journal of Nanoscience and Nanotechnology |
Volume | 17 |
Issue number | 10 |
DOIs | |
State | Published - Oct 2017 |
Keywords
- Resistive Switching
- RRAM
- Tantalum Oxide
- Titanium Oxide