Recent advances on MEMS based Infrared Thermopile detectors

Sofiane Ben Mbarek; Nouha Alcheikh; Mohammad I. Younis

doi:10.1007/s00542-022-05306-8

Recent advances on MEMS based Infrared Thermopile detectors

Sofiane Ben Mbarek, Nouha Alcheikh, Mohammad I. Younis

Mechanical & Nuclear Engineering

King Abdullah University of Science and Technology

Research output: Contribution to journal › Review article › peer-review

9 Scopus citations

Abstract

During the last decade, IR MEMS thermopile detectors have become a topic of increasing interest because of their reliable characteristics and excellent cost-performance ratio. Because of their many attractive characteristics, thermopile detectors have been frequently used in various IR detection applications. In this paper, we present an overview of the recent advances on MEMS based infrared detectors. The first part deals with the IR MEMS thermopile concepts and discusses the recent state of the art of IR absorber designs, thermocouple designs, and their materials processing. The status of IR MEMS detectors performances is examined in the second part and summarized by presenting findings from the last decade. It is concluded that the latest developments in MEMS technology and thermoelectric materials offer high potential for innovative solutions to improve the IR thermopile performances.

Original language	British English
Pages (from-to)	1751-1764
Number of pages	14
Journal	Microsystem Technologies
Volume	28
Issue number	8
DOIs	https://doi.org/10.1007/s00542-022-05306-8
State	Published - Aug 2022

Keywords

Absorber
Infrared detector
MEMS Thermopile
Thermocouple

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10.1007/s00542-022-05306-8

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title = "Recent advances on MEMS based Infrared Thermopile detectors",

abstract = "During the last decade, IR MEMS thermopile detectors have become a topic of increasing interest because of their reliable characteristics and excellent cost-performance ratio. Because of their many attractive characteristics, thermopile detectors have been frequently used in various IR detection applications. In this paper, we present an overview of the recent advances on MEMS based infrared detectors. The first part deals with the IR MEMS thermopile concepts and discusses the recent state of the art of IR absorber designs, thermocouple designs, and their materials processing. The status of IR MEMS detectors performances is examined in the second part and summarized by presenting findings from the last decade. It is concluded that the latest developments in MEMS technology and thermoelectric materials offer high potential for innovative solutions to improve the IR thermopile performances.",

keywords = "Absorber, Infrared detector, MEMS Thermopile, Thermocouple",

author = "Mbarek, {Sofiane Ben} and Nouha Alcheikh and Younis, {Mohammad I.}",

note = "Funding Information: This work has been supported by KAUST. Publisher Copyright: {\textcopyright} 2022, The Author(s), under exclusive licence to Springer-Verlag GmbH Germany, part of Springer Nature.",

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AU - Alcheikh, Nouha

AU - Younis, Mohammad I.

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Y1 - 2022/8

N2 - During the last decade, IR MEMS thermopile detectors have become a topic of increasing interest because of their reliable characteristics and excellent cost-performance ratio. Because of their many attractive characteristics, thermopile detectors have been frequently used in various IR detection applications. In this paper, we present an overview of the recent advances on MEMS based infrared detectors. The first part deals with the IR MEMS thermopile concepts and discusses the recent state of the art of IR absorber designs, thermocouple designs, and their materials processing. The status of IR MEMS detectors performances is examined in the second part and summarized by presenting findings from the last decade. It is concluded that the latest developments in MEMS technology and thermoelectric materials offer high potential for innovative solutions to improve the IR thermopile performances.

AB - During the last decade, IR MEMS thermopile detectors have become a topic of increasing interest because of their reliable characteristics and excellent cost-performance ratio. Because of their many attractive characteristics, thermopile detectors have been frequently used in various IR detection applications. In this paper, we present an overview of the recent advances on MEMS based infrared detectors. The first part deals with the IR MEMS thermopile concepts and discusses the recent state of the art of IR absorber designs, thermocouple designs, and their materials processing. The status of IR MEMS detectors performances is examined in the second part and summarized by presenting findings from the last decade. It is concluded that the latest developments in MEMS technology and thermoelectric materials offer high potential for innovative solutions to improve the IR thermopile performances.

KW - Absorber

KW - Infrared detector

KW - MEMS Thermopile

KW - Thermocouple

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Recent advances on MEMS based Infrared Thermopile detectors

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Keywords

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