Radiative properties of SIMOX

Nuggehalli M. Ravindra; Sufian Abedrabbo; Oktay H. Gokce; Feiming Tong; Anamika Patel; Rajasekhar Velagapudi; Gary D. Williamson; Witold P. Maszara

doi:10.1109/95.725208

Radiative properties of SIMOX

Nuggehalli M. Ravindra
, Sufian Abedrabbo
, Oktay H. Gokce
, Feiming Tong
, Anamika Patel
, Rajasekhar Velagapudi
, Gary D. Williamson
, Witold P. Maszara

Physics

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

The first experimental results of the temperature dependent radiative properties of separation by implantation of oxygen (SIMOX) wafers, in the literature, have been reported in this study. These measurements have been performed in the temperature range of 17 to 800°C and wavelength range of 0.8 to 20 μm using a spectral emissometer. A modeling approach based on Multi-Rad, a matrix method of representing multi-layers, has been adopted to interpret the experimental data. Operating ranges of wavelength for pyrometry have been suggested for a reliable monitoring of temperature for processing SIMOX wafers.

Original language	British English
Pages (from-to)	441-448
Number of pages	8
Journal	IEEE Transactions on Components Packaging and Manufacturing Technology Part A
Volume	21
Issue number	3
DOIs	https://doi.org/10.1109/95.725208
State	Published - Sep 1998

Keywords

Emissivity
Pyrometer
Radiative properties
SIMOX
SOI
Temperature measurement

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10.1109/95.725208

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title = "Radiative properties of SIMOX",

abstract = "The first experimental results of the temperature dependent radiative properties of separation by implantation of oxygen (SIMOX) wafers, in the literature, have been reported in this study. These measurements have been performed in the temperature range of 17 to 800°C and wavelength range of 0.8 to 20 μm using a spectral emissometer. A modeling approach based on Multi-Rad, a matrix method of representing multi-layers, has been adopted to interpret the experimental data. Operating ranges of wavelength for pyrometry have been suggested for a reliable monitoring of temperature for processing SIMOX wafers.",

keywords = "Emissivity, Pyrometer, Radiative properties, SIMOX, SOI, Temperature measurement",

author = "Ravindra, \{Nuggehalli M.\} and Sufian Abedrabbo and Gokce, \{Oktay H.\} and Feiming Tong and Anamika Patel and Rajasekhar Velagapudi and Williamson, \{Gary D.\} and Maszara, \{Witold P.\}",

year = "1998",

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T1 - Radiative properties of SIMOX

AU - Ravindra, Nuggehalli M.

AU - Abedrabbo, Sufian

AU - Gokce, Oktay H.

AU - Tong, Feiming

AU - Patel, Anamika

AU - Velagapudi, Rajasekhar

AU - Williamson, Gary D.

AU - Maszara, Witold P.

PY - 1998/9

Y1 - 1998/9

N2 - The first experimental results of the temperature dependent radiative properties of separation by implantation of oxygen (SIMOX) wafers, in the literature, have been reported in this study. These measurements have been performed in the temperature range of 17 to 800°C and wavelength range of 0.8 to 20 μm using a spectral emissometer. A modeling approach based on Multi-Rad, a matrix method of representing multi-layers, has been adopted to interpret the experimental data. Operating ranges of wavelength for pyrometry have been suggested for a reliable monitoring of temperature for processing SIMOX wafers.

AB - The first experimental results of the temperature dependent radiative properties of separation by implantation of oxygen (SIMOX) wafers, in the literature, have been reported in this study. These measurements have been performed in the temperature range of 17 to 800°C and wavelength range of 0.8 to 20 μm using a spectral emissometer. A modeling approach based on Multi-Rad, a matrix method of representing multi-layers, has been adopted to interpret the experimental data. Operating ranges of wavelength for pyrometry have been suggested for a reliable monitoring of temperature for processing SIMOX wafers.

KW - Emissivity

KW - Pyrometer

KW - Radiative properties

KW - SIMOX

KW - SOI

KW - Temperature measurement

UR - https://www.scopus.com/pages/publications/0032156537

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DO - 10.1109/95.725208

M3 - Article

AN - SCOPUS:0032156537

SN - 1070-9886

VL - 21

SP - 441

EP - 448

JO - IEEE Transactions on Components Packaging and Manufacturing Technology Part A

JF - IEEE Transactions on Components Packaging and Manufacturing Technology Part A

IS - 3

ER -

Radiative properties of SIMOX

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