@inproceedings{5cda80d4ab5b4425ba9fd27ed95f8a51,
title = "Piezoelectric micromachined ultrasonic transducers and micropumps: From design to optomicrofluidic applications",
abstract = "In this work, we present the experimental results of a new wafer-level production platform for aluminum nitride based piezoelectric micromachined ultrasonic transducers (PMUTs), operated by lower than 10 V peak-to-peak signals, and covering ultrasonic frequency ranges from 200 kHz up to 10 MHz, with measured axial displacements ranging from a few nanometers up to 600 nm. The fabricated devices have a low footprint of (130x130) μm2. The experimental results are in excellent agreement with finite-element method simulations. The small footprint and driving voltages of these piezo-microactuators are well suited for the development of micropump and micromixer designs for portable microfluidics applications.",
keywords = "Aluminum nitride, MEMS, Micromachined, PMUT, Ultrasonic transducer",
author = "Shadi Khazaaleh and Numan Saeed and Inas Taha and Madzik, {Mateusz T.} and Jaime Viegas",
note = "Publisher Copyright: {\textcopyright} 2017 SPIE.; Microfluidics, BioMEMS, and Medical Microsystems XV ; Conference date: 28-01-2017 Through 30-01-2017",
year = "2017",
doi = "10.1117/12.2254733",
language = "British English",
series = "Progress in Biomedical Optics and Imaging - Proceedings of SPIE",
publisher = "SPIE",
editor = "Holger Becker and Gray, {Bonnie L.}",
booktitle = "Microfluidics, BioMEMS, and Medical Microsystems XV",
address = "United States",
}