ORMOSIL thin films: Tuning mechanical properties via a nanochemistry approach

Giovanni Palmisano, Eric Le Bourhis, Rosaria Ciriminna, Davide Tranchida, Mario Pagliaro

Research output: Contribution to journalArticlepeer-review

25 Scopus citations

Abstract

The mechanical properties (hardness and elastic modulus) of organically modified silicate thin films can be finely tuned by varying the degree of alkylation and thus the fraction of six- and four-membered siloxane rings in the organosilica matrix. This opens the way to large tunability of parameters that are of crucial practical importance for films that are finding increasing application in numerous fields ranging from microelectronics to chemical sensing.

Original languageBritish English
Pages (from-to)11158-11162
Number of pages5
JournalLangmuir
Volume22
Issue number26
DOIs
StatePublished - 19 Dec 2006

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