@inproceedings{8fea31f7f057451ea3c912abeaa65f1b,
title = "Optimization of piezoresponse in ALD Al doped ZnO thin films on flexible substrates for IoT related sensing applications",
abstract = "This report explores the effect of Al doping on the piezoresponse of ALD grown ZnO thin films. A proof-of-concept strain sensor with various doping levels was fabricated and characterized, demonstrating gauge factor up to 500.",
author = "Ayman Rezk and Irfan Saadat",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 12th IEEE Nanotechnology Materials and Devices Conference, NMDC 2017 ; Conference date: 02-10-2017 Through 04-10-2017",
year = "2017",
month = jul,
day = "2",
doi = "10.1109/NMDC.2017.8350489",
language = "British English",
series = "2017 IEEE 12th Nanotechnology Materials and Devices Conference, NMDC 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "27--28",
booktitle = "2017 IEEE 12th Nanotechnology Materials and Devices Conference, NMDC 2017",
address = "United States",
}