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Optimazation of the parameters involved in the photochemical doping of Si with a pulsed ArF excimer laser

  • F. Foulon
  • , A. Slaoui
  • , E. Fogarassy
  • , R. Stuck
  • , C. Fuchs
  • , P. Siffert
    • Centre de Recherches Nucleaires (IN2P3)

    Research output: Contribution to journal › Article › peer-review

    19 Scopus citations

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