@inproceedings{1d86b498af3a411f95c3da780677112d,
title = "Optical metrology of AlN piezomachined ultrasonic transducer arrays and piezopumps",
abstract = "Piezomachined ultrasonic transducer (PMUT) arrays are commonly found in applications in the field of ultrasonography and gesture recognition systems. Their application for bio and chemical sample preparation is another possibility, based on their beam steering and acoustic field manipulation capabilities. Post-fabrication non-destructive measurement of key device temporal and spatial parameters is required in order to adjust either simulation models or tune fabrication steps. In this work we report an optical testing setup for measuring the acoustic spectrum of PMUT devices and arrays, characterize maximum deflection of PMUTs and piezopumps and investigate the load effect of electrical contacts on the spatial and temporal oscillation behavior of these piezoelectric structures. Spatial parameters are evaluated with digital holography and temporal parameters with single point Doppler shift and frequency-shifted. We employ this testing setup to measure our own designed PMUT structures which were fabricated at IME-Singapore, evaluating the relative merits of the PMUT design parameters.",
keywords = "Digital Holography, PMUTs",
author = "Mateusz M{\c a}dzik and Inas Taha and Raquel Flores and Ricardo Janeiro and Jaime Viegas",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; MOEMS and Miniaturized Systems XIV ; Conference date: 09-02-2015 Through 12-02-2015",
year = "2015",
doi = "10.1117/12.2080721",
language = "British English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Yong-Hwa Park and Wibool Piyawattanametha",
booktitle = "MOEMS and Miniaturized Systems XIV",
address = "United States",
}