Optical metrology of AlN piezomachined ultrasonic transducer arrays and piezopumps

Mateusz Mądzik, Inas Taha, Raquel Flores, Ricardo Janeiro, Jaime Viegas

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


Piezomachined ultrasonic transducer (PMUT) arrays are commonly found in applications in the field of ultrasonography and gesture recognition systems. Their application for bio and chemical sample preparation is another possibility, based on their beam steering and acoustic field manipulation capabilities. Post-fabrication non-destructive measurement of key device temporal and spatial parameters is required in order to adjust either simulation models or tune fabrication steps. In this work we report an optical testing setup for measuring the acoustic spectrum of PMUT devices and arrays, characterize maximum deflection of PMUTs and piezopumps and investigate the load effect of electrical contacts on the spatial and temporal oscillation behavior of these piezoelectric structures. Spatial parameters are evaluated with digital holography and temporal parameters with single point Doppler shift and frequency-shifted. We employ this testing setup to measure our own designed PMUT structures which were fabricated at IME-Singapore, evaluating the relative merits of the PMUT design parameters.

Original languageBritish English
Title of host publicationMOEMS and Miniaturized Systems XIV
EditorsYong-Hwa Park, Wibool Piyawattanametha
ISBN (Electronic)9781628414653
StatePublished - 2015
EventMOEMS and Miniaturized Systems XIV - San Francisco, United States
Duration: 9 Feb 201512 Feb 2015

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceMOEMS and Miniaturized Systems XIV
Country/TerritoryUnited States
CitySan Francisco


  • Digital Holography
  • PMUTs


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