Numerical modeling and validation of squeezed-film damping in vacuum-packaged industrial MEMS
- Wajih U. Syed
- , Ayoola Brimmo
- , Owais Waheed
- , Alabi Bojesomo
- , Mohamed Hassan Ali
- , Ilker Ocak
- , Sun Chengliang
- , Aveek Chatterjee
- , Ibrahim M. Elfadel
- A-Star, Institute of Microelectronics
- GLOBALFOUNDRIES
Research output: Contribution to journal › Article › peer-review
11
Scopus
citations