New piezodriven precision micropositioning stage utilizing flexure hinges

Peng Gao, Shan Min Swei, Zhejun Yuan

Research output: Contribution to journalArticlepeer-review

122 Scopus citations

Abstract

A precision micropositioning system with a high displacement resolution and wide motion range has been required for industrialized applications for a long time. This paper discusses the design and the characteristics of a new piezodriven precision micropositioning stage utilizing flexure hinges. Two-grade amplifying and a monolithic symmetrical mechanism are adopted in the design. An analytical model is presented and a series of formulae for the static and dynamic behaviour of the stage are derived. Based on the theoretical analysis, the optimum design schema is put forward. The experimental demonstration to study the performance of the stage is described, and the method for reducing nonlinearity errors is proposed. The experimental results are in close agreement with those predicted by the theoretical analysis.

Original languageBritish English
Pages (from-to)394-398
Number of pages5
JournalNanotechnology
Volume10
Issue number4
DOIs
StatePublished - Dec 1999

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