Nanomechanical and nanotribological behaviors of hafnium boride thin films

Shahla Chowdhury; Kyriaki Polychronopoulou; Andrew Cloud; John R. Abelson; Andreas A. Polycarpou

doi:10.1016/j.tsf.2015.10.030

Nanomechanical and nanotribological behaviors of hafnium boride thin films

Shahla Chowdhury, Kyriaki Polychronopoulou, Andrew Cloud, John R. Abelson, Andreas A. Polycarpou

Mechanical & Nuclear Engineering

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

Nanocrystalline HfB₂, HfBN and multilayer HfB₂/HfBN films were deposited using chemical vapor deposition. Half of the amorphous as-deposited films were subjected to annealing at 700 °C to obtain their annealed equivalent samples. Nanoindentation and nanoscratch experiments were performed to measure their mechanical properties, friction and scratch/wear behavior. The annealed films showed higher hardness values compared to the as-deposited films, with the HfB₂ film exhibiting the highest hardness. All three films exhibited similar shear strength around 3 GPa for as-deposited and 5.5 GPa for annealed films, implying reduced delamination propensity for the annealed samples. The annealed HfBN and multilayer HfB₂/HfBN films exhibited lower friction and wear, compared to the rest of the films. Specifically, the annealed multilayer HfB₂/HfBN films, exhibited an order of magnitude lower wear, compared to the HfB₂ films, making them excellent candidates for low friction and low wear hard coating applications.

Original language	British English
Pages (from-to)	84-91
Number of pages	8
Journal	Thin Solid Films
Volume	595
DOIs	https://doi.org/10.1016/j.tsf.2015.10.030
State	Published - 1 Nov 2015

Keywords

Hafnium boride
Nanocoating
Nanomechanics
Nanowear
SEM
XPS

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10.1016/j.tsf.2015.10.030

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title = "Nanomechanical and nanotribological behaviors of hafnium boride thin films",

abstract = "Nanocrystalline HfB2, HfBN and multilayer HfB2/HfBN films were deposited using chemical vapor deposition. Half of the amorphous as-deposited films were subjected to annealing at 700 °C to obtain their annealed equivalent samples. Nanoindentation and nanoscratch experiments were performed to measure their mechanical properties, friction and scratch/wear behavior. The annealed films showed higher hardness values compared to the as-deposited films, with the HfB2 film exhibiting the highest hardness. All three films exhibited similar shear strength around 3 GPa for as-deposited and 5.5 GPa for annealed films, implying reduced delamination propensity for the annealed samples. The annealed HfBN and multilayer HfB2/HfBN films exhibited lower friction and wear, compared to the rest of the films. Specifically, the annealed multilayer HfB2/HfBN films, exhibited an order of magnitude lower wear, compared to the HfB2 films, making them excellent candidates for low friction and low wear hard coating applications.",

keywords = "Hafnium boride, Nanocoating, Nanomechanics, Nanowear, SEM, XPS",

author = "Shahla Chowdhury and Kyriaki Polychronopoulou and Andrew Cloud and Abelson, {John R.} and Polycarpou, {Andreas A.}",

note = "Funding Information: This research was supported by the National Science Foundation under Grant no. NSF CMMI 10-30657 . The morphological and structural analyses of the films was performed at the Center for Microanalysis of Materials at the University of Illinois, which is supported by the U.S. Department of Energy under Grant DEFG02-96-ER45439 . We thank Dr. M. Sardela for his valuable help in performing the XRD measurements. Publisher Copyright: {\textcopyright} 2015",

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doi = "10.1016/j.tsf.2015.10.030",

language = "British English",

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AU - Chowdhury, Shahla

AU - Polychronopoulou, Kyriaki

AU - Cloud, Andrew

AU - Abelson, John R.

AU - Polycarpou, Andreas A.

N1 - Funding Information: This research was supported by the National Science Foundation under Grant no. NSF CMMI 10-30657 . The morphological and structural analyses of the films was performed at the Center for Microanalysis of Materials at the University of Illinois, which is supported by the U.S. Department of Energy under Grant DEFG02-96-ER45439 . We thank Dr. M. Sardela for his valuable help in performing the XRD measurements. Publisher Copyright: © 2015

PY - 2015/11/1

Y1 - 2015/11/1

N2 - Nanocrystalline HfB2, HfBN and multilayer HfB2/HfBN films were deposited using chemical vapor deposition. Half of the amorphous as-deposited films were subjected to annealing at 700 °C to obtain their annealed equivalent samples. Nanoindentation and nanoscratch experiments were performed to measure their mechanical properties, friction and scratch/wear behavior. The annealed films showed higher hardness values compared to the as-deposited films, with the HfB2 film exhibiting the highest hardness. All three films exhibited similar shear strength around 3 GPa for as-deposited and 5.5 GPa for annealed films, implying reduced delamination propensity for the annealed samples. The annealed HfBN and multilayer HfB2/HfBN films exhibited lower friction and wear, compared to the rest of the films. Specifically, the annealed multilayer HfB2/HfBN films, exhibited an order of magnitude lower wear, compared to the HfB2 films, making them excellent candidates for low friction and low wear hard coating applications.

AB - Nanocrystalline HfB2, HfBN and multilayer HfB2/HfBN films were deposited using chemical vapor deposition. Half of the amorphous as-deposited films were subjected to annealing at 700 °C to obtain their annealed equivalent samples. Nanoindentation and nanoscratch experiments were performed to measure their mechanical properties, friction and scratch/wear behavior. The annealed films showed higher hardness values compared to the as-deposited films, with the HfB2 film exhibiting the highest hardness. All three films exhibited similar shear strength around 3 GPa for as-deposited and 5.5 GPa for annealed films, implying reduced delamination propensity for the annealed samples. The annealed HfBN and multilayer HfB2/HfBN films exhibited lower friction and wear, compared to the rest of the films. Specifically, the annealed multilayer HfB2/HfBN films, exhibited an order of magnitude lower wear, compared to the HfB2 films, making them excellent candidates for low friction and low wear hard coating applications.

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KW - Nanocoating

KW - Nanomechanics

KW - Nanowear

KW - SEM

KW - XPS

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Nanomechanical and nanotribological behaviors of hafnium boride thin films

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Keywords

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