@inproceedings{75c4964ff8924f2c80ef67afa8a8626d,
title = "Nanomaterials-based ultracapacitor for power integrated circuits",
abstract = "Some aging effects limit current supply to the Integrated Circuit (IC) due to the instable switching power supply, requiring an additional specific circuit board for supplying and regulating electric power to the main circuit board. It can be solved by depositing a capacitance layer on top of circuitry substrate. Copper (Cu) nanotube (NT)-based micro-chip capacitors fabricated onto an IC can be used to compensate the power requirement in regulating electric power to a circuit board. In this work, a process for fabricating NTs electrodes which may be compatible with complementary metal-oxide-semiconductor (CMOS) is presented. Cu NTs were used as the electrode materials for the on-chip capacitors. Anodized Oxide aluminum (AAO) templates integrated on SiO2/Si substrates were used for fabrication of a vertical array of Cu NTs. The surface area of the capacitor was increased by adding Cu NTs which enable a high density of capacitance for the devices.",
keywords = "Copper nanotubes, IC, Ultra-capacitor",
author = "Waqas Gill and Daniel Choi",
year = "2015",
doi = "10.1002/9781119090427.ch38",
language = "British English",
series = "Proceedings of the TMS Middle East - Mediterranean Materials Congress on Energy and Infrastructure Systems, MEMA 2015",
publisher = "John Wiley and Sons Inc.",
pages = "357--360",
editor = "Ibrahim Karaman and Raymundo Arroyave and Eyad Masad and Eyad Masad",
booktitle = "Proceedings of the TMS Middle East - Mediterranean Materials Congress on Energy and Infrastructure Systems, MEMA 2015",
address = "United States",
note = "TMS Middle East - Mediterranean Materials Congress on Energy and Infrastructure Systems, MEMA 2015 ; Conference date: 11-01-2015 Through 14-01-2015",
}
