Modeling and Analysis of a Navigational, Lorentz-Force, Z-axis MEMS Magnetometer in a Standard Process

Muneera Al-Shaibah; Wajih Syed; Boohyun An; Zakriya Mohammad; Sultan Aldahmani; Daniel Choi; Ibrahim Elfadel

doi:10.1109/DTIP.2019.8752782

Modeling and Analysis of a Navigational, Lorentz-Force, Z-axis MEMS Magnetometer in a Standard Process

Muneera Al-Shaibah
, Wajih Syed
, Boohyun An
, Zakriya Mohammad
, Sultan Aldahmani
, Daniel Choi
, Ibrahim Elfadel

Space Missions’ Science and Technology Directorate

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

This paper introduces a Z-axis Lorentz-force. capacitive, microelectromechanical (MEMS) magnetometer design using the MEMSCAP SOI process. The magnetometer model is analyzed using Matlab and a MEMS+ interfacing code to detect the displacement motion and the capacitance difference in the device under different damping conditions. The magnetometer is shown to have a mode frequency of 668 MHz but low mechanical and electrical sensitivities as the small mechanical displacements and capacitance change indicate. The device has high resolution and is able to measure nano-scaled motion but at high quality factor values. Several parameters sweep such as beam's width and length have been performed and optimal values have been determined to maximize the mechanical sensitivity of the device.

Original language	British English
Title of host publication	2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781728132860
DOIs	https://doi.org/10.1109/DTIP.2019.8752782
State	Published - May 2019
Event	2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019 - Paris, France Duration: 12 May 2019 → 15 May 2019

Publication series

Name	2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019

Conference

Conference	2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019
Country/Territory	France
City	Paris
Period	12/05/19 → 15/05/19

Keywords

Lorentz force
Magnetometer
MEMS

Access to Document

10.1109/DTIP.2019.8752782

Cite this

Al-Shaibah, M., Syed, W., An, B., Mohammad, Z., Aldahmani, S., Choi, D., & Elfadel, I. (2019). Modeling and Analysis of a Navigational, Lorentz-Force, Z-axis MEMS Magnetometer in a Standard Process. In 2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019 Article 8752782 (2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DTIP.2019.8752782

Al-Shaibah, Muneera ; Syed, Wajih ; An, Boohyun et al. / Modeling and Analysis of a Navigational, Lorentz-Force, Z-axis MEMS Magnetometer in a Standard Process. 2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019. Institute of Electrical and Electronics Engineers Inc., 2019. (2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019).

@inproceedings{bf060f43174f44c7888844952c8a6134,

title = "Modeling and Analysis of a Navigational, Lorentz-Force, Z-axis MEMS Magnetometer in a Standard Process",

abstract = "This paper introduces a Z-axis Lorentz-force. capacitive, microelectromechanical (MEMS) magnetometer design using the MEMSCAP SOI process. The magnetometer model is analyzed using Matlab and a MEMS+ interfacing code to detect the displacement motion and the capacitance difference in the device under different damping conditions. The magnetometer is shown to have a mode frequency of 668 MHz but low mechanical and electrical sensitivities as the small mechanical displacements and capacitance change indicate. The device has high resolution and is able to measure nano-scaled motion but at high quality factor values. Several parameters sweep such as beam's width and length have been performed and optimal values have been determined to maximize the mechanical sensitivity of the device.",

keywords = "Lorentz force, Magnetometer, MEMS",

author = "Muneera Al-Shaibah and Wajih Syed and Boohyun An and Zakriya Mohammad and Sultan Aldahmani and Daniel Choi and Ibrahim Elfadel",

note = "Funding Information: ACKNOWLEDGMENTS This work is funded by the United Arab Emirates Space Agency, Space Missions Science and Technology Directorate, Reference M06\&15-2016-002. We acknowledge the help of Dr. Jun Yan, Coventor, for providing us with the Matlab code used in the Lorentz force simulations. Publisher Copyright: {\textcopyright} 2019 IEEE.; 2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019 ; Conference date: 12-05-2019 Through 15-05-2019",

year = "2019",

month = may,

doi = "10.1109/DTIP.2019.8752782",

language = "British English",

series = "2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019",

address = "United States",

}

Al-Shaibah, M, Syed, W, An, B, Mohammad, Z, Aldahmani, S, Choi, D & Elfadel, I 2019, Modeling and Analysis of a Navigational, Lorentz-Force, Z-axis MEMS Magnetometer in a Standard Process. in 2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019., 8752782, 2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019, Institute of Electrical and Electronics Engineers Inc., 2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019, Paris, France, 12/05/19. https://doi.org/10.1109/DTIP.2019.8752782

Modeling and Analysis of a Navigational, Lorentz-Force, Z-axis MEMS Magnetometer in a Standard Process. / Al-Shaibah, Muneera; Syed, Wajih; An, Boohyun et al.
2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019. Institute of Electrical and Electronics Engineers Inc., 2019. 8752782 (2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Modeling and Analysis of a Navigational, Lorentz-Force, Z-axis MEMS Magnetometer in a Standard Process

AU - Al-Shaibah, Muneera

AU - Syed, Wajih

AU - An, Boohyun

AU - Mohammad, Zakriya

AU - Aldahmani, Sultan

AU - Choi, Daniel

AU - Elfadel, Ibrahim

N1 - Funding Information: ACKNOWLEDGMENTS This work is funded by the United Arab Emirates Space Agency, Space Missions Science and Technology Directorate, Reference M06&15-2016-002. We acknowledge the help of Dr. Jun Yan, Coventor, for providing us with the Matlab code used in the Lorentz force simulations. Publisher Copyright: © 2019 IEEE.

PY - 2019/5

Y1 - 2019/5

N2 - This paper introduces a Z-axis Lorentz-force. capacitive, microelectromechanical (MEMS) magnetometer design using the MEMSCAP SOI process. The magnetometer model is analyzed using Matlab and a MEMS+ interfacing code to detect the displacement motion and the capacitance difference in the device under different damping conditions. The magnetometer is shown to have a mode frequency of 668 MHz but low mechanical and electrical sensitivities as the small mechanical displacements and capacitance change indicate. The device has high resolution and is able to measure nano-scaled motion but at high quality factor values. Several parameters sweep such as beam's width and length have been performed and optimal values have been determined to maximize the mechanical sensitivity of the device.

AB - This paper introduces a Z-axis Lorentz-force. capacitive, microelectromechanical (MEMS) magnetometer design using the MEMSCAP SOI process. The magnetometer model is analyzed using Matlab and a MEMS+ interfacing code to detect the displacement motion and the capacitance difference in the device under different damping conditions. The magnetometer is shown to have a mode frequency of 668 MHz but low mechanical and electrical sensitivities as the small mechanical displacements and capacitance change indicate. The device has high resolution and is able to measure nano-scaled motion but at high quality factor values. Several parameters sweep such as beam's width and length have been performed and optimal values have been determined to maximize the mechanical sensitivity of the device.

KW - Lorentz force

KW - Magnetometer

KW - MEMS

UR - https://www.scopus.com/pages/publications/85069537664

U2 - 10.1109/DTIP.2019.8752782

DO - 10.1109/DTIP.2019.8752782

M3 - Conference contribution

AN - SCOPUS:85069537664

T3 - 2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019

BT - 2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019

Y2 - 12 May 2019 through 15 May 2019

ER -

Al-Shaibah M, Syed W, An B, Mohammad Z, Aldahmani S, Choi D et al. Modeling and Analysis of a Navigational, Lorentz-Force, Z-axis MEMS Magnetometer in a Standard Process. In 2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019. Institute of Electrical and Electronics Engineers Inc. 2019. 8752782. (2019 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2019). doi: 10.1109/DTIP.2019.8752782

Modeling and Analysis of a Navigational, Lorentz-Force, Z-axis MEMS Magnetometer in a Standard Process

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