Mode-dependent selective detection of humidity and helium using electromagnetically actuated clamped guided mems resonators

Usman Yaqoob, Nizar Jabert, Nouha Alcheikh, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this work, we demonstrate a selective gas sensor based on monitoring two different detection mechanisms; absorption and thermal conductivity. To illustrate the concept, we utilize a resonator composed of a clamped-guided arch beam connected to flexural beams and a T-shaped moveable mass. The resonator has two distinct out-of-plane modes in which the mass motion dominates the first mode while the motion of the flexural beam dominates the second mode. A highly disperse graphene oxide (GO) solution is prepared and drop-casted over the moveable mass structure using the inkjet printer for humidity sensing. On the other hand, the He is detected using the hot flexural beams. The results show no significant effect of humidity on the flexural mode (FM) nor for He on the mass mode (MM). This indicates a new technique for selectivity and identification. The device shows good sensitivity (50.1% to 50% RH @ MM and 39.2% to 50% He @ FM: (Vac=1.5V)), linearity, and repeatability with excellent selectivity. It is demonstrated that the FM has great potential for detecting and categorizing different gases according to their thermal conductivity. The demonstrated multimode MEMS resonator can be a promising approach for the development of smart, highly selective, and sensitive gas/chemical sensors.

Original languageBritish English
Title of host publication15th International Conference on Micro- and Nanosystems (MNS)
ISBN (Electronic)9780791885482
DOIs
StatePublished - 2021
Event15th International Conference on Micro- and Nanosystems, MNS 2021, Held as Part of the ASME 2021 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC-CIE 2021 - Virtual, Online
Duration: 17 Aug 202119 Aug 2021

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume11

Conference

Conference15th International Conference on Micro- and Nanosystems, MNS 2021, Held as Part of the ASME 2021 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC-CIE 2021
CityVirtual, Online
Period17/08/2119/08/21

Keywords

  • Graphene oxide
  • MEMS resonators
  • Multimode sensing
  • Relative humidity

Fingerprint

Dive into the research topics of 'Mode-dependent selective detection of humidity and helium using electromagnetically actuated clamped guided mems resonators'. Together they form a unique fingerprint.

Cite this