Microstructure, mechanical and tribological properties of reactive magnetron sputtered titanium carbide coatings

Kyriaki Polychronopoulou; Claus Rebholz; Lefki Theodorou; Klaus Böbel; Nicholaos G. Demás; Andreas A. Polycarpou

doi:10.1115/IJTC2007-44457

Microstructure, mechanical and tribological properties of reactive magnetron sputtered titanium carbide coatings

Kyriaki Polychronopoulou, Claus Rebholz, Lefki Theodorou, Klaus Böbel, Nicholaos G. Demás, Andreas A. Polycarpou

Mechanical & Nuclear Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This study describes the correlation between the microstructure, mechanical and tribological properties of Ti _1-xC_x coatings (with x being in the range of 0-0.5), deposited by reactive magnetron sputtering from a Ti target in Ar/C₂H₂ mixtures at -200 °C. The mechanical and tribological properties were found to strongly depend on the chemical composition and the microstructure present. Very dense structures and highest hardness and elastic modulus, combined with low wear rates, were observed for films with chemical composition close to TiC. X-ray diffraction (XRD) studies showed that the coating deposited at high C₂H ₂ flow rates composed of randomly oriented TiC crystallites. Morphological investigations by scanning electron microscopy (SEM) indicate that the morphology is strongly dependent on the carbon content of the coating. Coatings composition and bonding environment was investigated using X-ray photoelectron spectroscopy (XPS). Both the mechanical properties and tribological performance of the coatings were found to be dependent on carbon content.

Original language	British English
Title of host publication	2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007
Pages	933-935
Number of pages	3
DOIs	https://doi.org/10.1115/IJTC2007-44457
State	Published - 2008
Event	2007 ASME/STLE International Joint Tribology Conference, IJTC 2007 - San Diego, CA, United States Duration: 22 Oct 2007 → 24 Oct 2007

Publication series

Name	2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007
Volume	PART B

Conference

Conference	2007 ASME/STLE International Joint Tribology Conference, IJTC 2007
Country/Territory	United States
City	San Diego, CA
Period	22/10/07 → 24/10/07

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10.1115/IJTC2007-44457

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Polychronopoulou, K., Rebholz, C., Theodorou, L., Böbel, K., Demás, N. G., & Polycarpou, A. A. (2008). Microstructure, mechanical and tribological properties of reactive magnetron sputtered titanium carbide coatings. In 2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007 (pp. 933-935). (2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007; Vol. PART B). https://doi.org/10.1115/IJTC2007-44457

Polychronopoulou, Kyriaki ; Rebholz, Claus ; Theodorou, Lefki et al. / Microstructure, mechanical and tribological properties of reactive magnetron sputtered titanium carbide coatings. 2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007. 2008. pp. 933-935 (2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007).

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title = "Microstructure, mechanical and tribological properties of reactive magnetron sputtered titanium carbide coatings",

abstract = "This study describes the correlation between the microstructure, mechanical and tribological properties of Ti 1-xCx coatings (with x being in the range of 0-0.5), deposited by reactive magnetron sputtering from a Ti target in Ar/C2H2 mixtures at -200 °C. The mechanical and tribological properties were found to strongly depend on the chemical composition and the microstructure present. Very dense structures and highest hardness and elastic modulus, combined with low wear rates, were observed for films with chemical composition close to TiC. X-ray diffraction (XRD) studies showed that the coating deposited at high C2H 2 flow rates composed of randomly oriented TiC crystallites. Morphological investigations by scanning electron microscopy (SEM) indicate that the morphology is strongly dependent on the carbon content of the coating. Coatings composition and bonding environment was investigated using X-ray photoelectron spectroscopy (XPS). Both the mechanical properties and tribological performance of the coatings were found to be dependent on carbon content.",

author = "Kyriaki Polychronopoulou and Claus Rebholz and Lefki Theodorou and Klaus B{\"o}bel and Dem{\'a}s, {Nicholaos G.} and Polycarpou, {Andreas A.}",

year = "2008",

doi = "10.1115/IJTC2007-44457",

language = "British English",

isbn = "0791848108",

series = "2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007",

pages = "933--935",

booktitle = "2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007",

note = "2007 ASME/STLE International Joint Tribology Conference, IJTC 2007 ; Conference date: 22-10-2007 Through 24-10-2007",

}

Polychronopoulou, K, Rebholz, C, Theodorou, L, Böbel, K, Demás, NG & Polycarpou, AA 2008, Microstructure, mechanical and tribological properties of reactive magnetron sputtered titanium carbide coatings. in 2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007. 2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007, vol. PART B, pp. 933-935, 2007 ASME/STLE International Joint Tribology Conference, IJTC 2007, San Diego, CA, United States, 22/10/07. https://doi.org/10.1115/IJTC2007-44457

Microstructure, mechanical and tribological properties of reactive magnetron sputtered titanium carbide coatings. / Polychronopoulou, Kyriaki; Rebholz, Claus; Theodorou, Lefki et al.
2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007. 2008. p. 933-935 (2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007; Vol. PART B).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Microstructure, mechanical and tribological properties of reactive magnetron sputtered titanium carbide coatings

AU - Polychronopoulou, Kyriaki

AU - Rebholz, Claus

AU - Theodorou, Lefki

AU - Böbel, Klaus

AU - Demás, Nicholaos G.

AU - Polycarpou, Andreas A.

PY - 2008

Y1 - 2008

N2 - This study describes the correlation between the microstructure, mechanical and tribological properties of Ti 1-xCx coatings (with x being in the range of 0-0.5), deposited by reactive magnetron sputtering from a Ti target in Ar/C2H2 mixtures at -200 °C. The mechanical and tribological properties were found to strongly depend on the chemical composition and the microstructure present. Very dense structures and highest hardness and elastic modulus, combined with low wear rates, were observed for films with chemical composition close to TiC. X-ray diffraction (XRD) studies showed that the coating deposited at high C2H 2 flow rates composed of randomly oriented TiC crystallites. Morphological investigations by scanning electron microscopy (SEM) indicate that the morphology is strongly dependent on the carbon content of the coating. Coatings composition and bonding environment was investigated using X-ray photoelectron spectroscopy (XPS). Both the mechanical properties and tribological performance of the coatings were found to be dependent on carbon content.

AB - This study describes the correlation between the microstructure, mechanical and tribological properties of Ti 1-xCx coatings (with x being in the range of 0-0.5), deposited by reactive magnetron sputtering from a Ti target in Ar/C2H2 mixtures at -200 °C. The mechanical and tribological properties were found to strongly depend on the chemical composition and the microstructure present. Very dense structures and highest hardness and elastic modulus, combined with low wear rates, were observed for films with chemical composition close to TiC. X-ray diffraction (XRD) studies showed that the coating deposited at high C2H 2 flow rates composed of randomly oriented TiC crystallites. Morphological investigations by scanning electron microscopy (SEM) indicate that the morphology is strongly dependent on the carbon content of the coating. Coatings composition and bonding environment was investigated using X-ray photoelectron spectroscopy (XPS). Both the mechanical properties and tribological performance of the coatings were found to be dependent on carbon content.

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M3 - Conference contribution

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SN - 0791848108

SN - 9780791848104

T3 - 2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007

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BT - 2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007

T2 - 2007 ASME/STLE International Joint Tribology Conference, IJTC 2007

Y2 - 22 October 2007 through 24 October 2007

ER -

Polychronopoulou K, Rebholz C, Theodorou L, Böbel K, Demás NG, Polycarpou AA. Microstructure, mechanical and tribological properties of reactive magnetron sputtered titanium carbide coatings. In 2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007. 2008. p. 933-935. (2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007). doi: 10.1115/IJTC2007-44457

Microstructure, mechanical and tribological properties of reactive magnetron sputtered titanium carbide coatings

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