Microelectrode fabrication using Indium Tin Oxide (ITO) for microfluidic devices employing dielectrophoresis

Nahrizul Adib Kadri, K. F. Hoettges, M. P. Hughes

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Scopus citations

Abstract

Dielectrophoresis (DEP) has been widely employed as one of the techniques in developing various micro-electromechanical systems (MEMS). The manipulation of particles using DEP forces is dependent upon the particles' dipole moment that is produced in the presence of an electric field gradient. The paper documents the fabrication processes employed at the University of Surrey in developing the microelectrodes to be used in generating the said field gradient.

Original languageBritish English
Title of host publication4th Kuala Lumpur International Conference on Biomedical Engineering 2008, Biomed 2008
PublisherSpringer Verlag
Pages719-722
Number of pages4
Edition1
ISBN (Print)9783540691389
DOIs
StatePublished - 2008

Publication series

NameIFMBE Proceedings
Number1
Volume21 IFMBE
ISSN (Print)1680-0737

Keywords

  • dielectrophoresis
  • indium tin oxide
  • lab on a chip
  • Microelectrode

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