Micro-capacitor with vertically grown silver nanowires and bismuth ferric oxide composite structures on silicon substrates

Daniel Choi, Boo Hyun An, Mariam Mansouri, Dima Ali, Malathe Khalil, Ke Xu, Dominic Nwoke, Jung Rae Park, Akash Shankar, Jong Eun Ryu

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

We have designed and demonstrated a complementary metal-oxide-semiconductor compatible process for fabricating high capacitance micro-capacitors based on vertically grown silver nanowires on silicon substrates. Array of silver nanowires with high-aspect ratio were electrochemically grown in the pores of anodized aluminum oxide film, which was pre-formed through anodization of aluminum thin film deposited on titanium/silicon oxide/silicon substrates. High dielectric bismuth ferric oxide layer was electrodeposited to fill the gap between silver nanowires after anodized aluminum oxide film was removed. It was found that the micro-capacitor based on the silver nanowires/bismuth ferric oxide composite film possessed higher capacitance by approximately one order of magnitude from the COMSOL simulation results from the flat Ag thin-film capacitor and the silver nanowire capacitor.

Original languageBritish English
Pages (from-to)965-969
Number of pages5
JournalJournal of Composite Materials
Volume51
Issue number7
DOIs
StatePublished - 1 Mar 2017

Keywords

  • energy storage
  • Micro-capacitor
  • nanocomposites
  • silver nanowires

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