MEMS vibrating wheel on gimbal gyroscope with high scale factor

In this paper, we report the effect of geometric parameters by calculating the capacitance scale factor of micromachined vibrating wheel on gimbal gyroscope with various shapes and mass conditions. The behavior of capacitance for vibratory torsional gyroscope with various shapes and mass conditions is investigated using MEMS+™. The structure dimensions of the gyroscope are optimized by matching frequencies in driving and sensing modes. The scale factor and linearity error extracted by calculated capacitance have been changed with various shapes condition unless the area of sensing electrodes and the mass of the gyroscope have been fixed. The mass ratio of gimbal and wheel structure is varied to minimize the linearity error.