MEMS vibrating wheel on gimbal gyroscope with high scale factor

Ji Sung Lee, Boo Hyun An, Mariam Mansouri, Hamad Al Yassi, Inas Taha, Waqas Amin Gill, Daniel S. Choi

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

In this paper, we report the effect of geometric parameters by calculating the capacitance scale factor of micromachined vibrating wheel on gimbal gyroscope with various shapes and mass conditions. The behavior of capacitance for vibratory torsional gyroscope with various shapes and mass conditions is investigated using MEMS+™. The structure dimensions of the gyroscope are optimized by matching frequencies in driving and sensing modes. The scale factor and linearity error extracted by calculated capacitance have been changed with various shapes condition unless the area of sensing electrodes and the mass of the gyroscope have been fixed. The mass ratio of gimbal and wheel structure is varied to minimize the linearity error.

Original languageBritish English
Pages (from-to)4645-4650
Number of pages6
JournalMicrosystem Technologies
Volume25
Issue number12
DOIs
StatePublished - 1 Dec 2019

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