MEMS multi-vibrating ring gyroscope for space applications

Waqas Amin Gill, Dima Ali, Boo Hyun An, Wajih U. Syed, Numan Saeed, Muneera Al-shaibah, Ibrahim M. Elfadel, Sultan Al Dahmani, Daniel S. Choi

Research output: Contribution to journalArticlepeer-review

20 Scopus citations

Abstract

This paper presents the design of a novel multi-ring vibratory gyroscope. The design incorporates two sets of rings, inner and outer, separated by a set of perforated inertial masses and connected to the outermost anchors by the means of springs. The structure’s performance is enhanced by utilizing springs with bends that play a significant role in reducing the device’s sensitivity to external shocks. The amalgamation of multiple rings with the C-shaped springs provides higher sensitivity with high shock resistance that makes this multi-vibrating ring gyroscope an ideal inertial sensor for space applications. Such a structure yields in-plane flexural modes that are utilized to sense rotation along the axis normal to the structure’s plane.

Original languageBritish English
Pages (from-to)2527-2533
Number of pages7
JournalMicrosystem Technologies
Volume26
Issue number8
DOIs
StatePublished - 1 Aug 2020

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