Abstract
The authors would like to make an addition to the caption of Fig. 1, notifying partly reused material from another journal. We would like to add the following in the caption of Fig. 1: Partly reused from N. El-Atab et al., Appl. Phys. Lett. 104, 013112 (2014) [4].
| Original language | British English |
|---|---|
| Pages (from-to) | 2264 |
| Number of pages | 1 |
| Journal | Physica Status Solidi (A) Applications and Materials Science |
| Volume | 213 |
| Issue number | 8 |
| DOIs |
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| State | Published - 1 Aug 2016 |
Keywords
- atomic layer deposition
- charge trapping memory
- laser processing
- metal–oxide–semiconductor structures
- nanoparticles
- silicon