@inproceedings{e293a6a10ab844f89bcac5103d1ccd2d,
title = "Mechanical properties of thin films: A new analytical model",
abstract = "Tip rounding and the consequent effective pressure distribution at the apex of a nano-indenter tip violate the basic assumptions of the equations employed to determine the elastic modulus. The consequences of this violation are especially severe in the estimation of elastic modulus of submicron thickness films. A new analytical model that relies on an accurate strategy for determining the tip radius and tip area function of the tip is proposed to account for the effect of tip rounding. The model verified experimentally on a submicron SiO2 thin film grown over silicon provides good results.",
author = "Gadelrab, {K. R.} and M. Chiesa",
year = "2011",
doi = "10.1142/9789814343909_0014",
language = "British English",
isbn = "9789814343893",
series = "Proceedings of International Conference NANOMEETING 2011: Physics, Chemistry and Applications of Nanostructures - Reviews and Short Notes",
publisher = "World Scientific Publishing Co. Pte Ltd",
pages = "70--73",
booktitle = "Proceedings of International Conference NANOMEETING 2011",
address = "Singapore",
note = "International Conference on Physics, Chemistry and Applications of Nanostructures, NANOMEETING 2011 ; Conference date: 24-05-2011 Through 27-05-2011",
}