Mechanical properties of thin films: A new analytical model

K. R. Gadelrab, M. Chiesa

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Tip rounding and the consequent effective pressure distribution at the apex of a nano-indenter tip violate the basic assumptions of the equations employed to determine the elastic modulus. The consequences of this violation are especially severe in the estimation of elastic modulus of submicron thickness films. A new analytical model that relies on an accurate strategy for determining the tip radius and tip area function of the tip is proposed to account for the effect of tip rounding. The model verified experimentally on a submicron SiO2 thin film grown over silicon provides good results.

Original languageBritish English
Title of host publicationProceedings of International Conference NANOMEETING 2011
Subtitle of host publicationPhysics, Chemistry and Applications of Nanostructures - Reviews and Short Notes
PublisherWorld Scientific Publishing Co. Pte Ltd
Pages70-73
Number of pages4
ISBN (Print)9789814343893
DOIs
StatePublished - 2011
EventInternational Conference on Physics, Chemistry and Applications of Nanostructures, NANOMEETING 2011 - Minsk, Belarus
Duration: 24 May 201127 May 2011

Publication series

NameProceedings of International Conference NANOMEETING 2011: Physics, Chemistry and Applications of Nanostructures - Reviews and Short Notes

Conference

ConferenceInternational Conference on Physics, Chemistry and Applications of Nanostructures, NANOMEETING 2011
Country/TerritoryBelarus
CityMinsk
Period24/05/1127/05/11

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