@inproceedings{4155b24e5a31479aaecc7a2395ccbcb7,
title = "Low-cost facile interferometer for displacement mapping of harmonically excited MEMS",
abstract = "In this work, we present a simple, assembled from readily available components, low cost, imaging vibrometer based on a Twyman-Green interferometer with digital interferogram acquisition, allowing to map displacement contour levels of a harmonically excited piezoelectric membrane, on the principle of exposure integration. We experimentally demonstrate the capabilities of our setup on imaging the 4th mechanical mode of vibration of a 200 micrometer radius piezoelectric micromachined ultrasonic transducer membrane vibrating at 842 kHz, with an out-of-plane amplitude of 475 nm. Our results allow a direct visualization of the influence of etching trenches onto the vibrating membrane, in excellent agreement with FEM simulations.",
keywords = "Digital holography, free-space optics, measurement, MEMS, vibration analysis",
author = "Mateusz Madzik and Jaime Viegas",
note = "Publisher Copyright: {\textcopyright} 2016 SPIE.; Photonic Instrumentation Engineering III ; Conference date: 17-02-2016 Through 18-02-2016",
year = "2016",
doi = "10.1117/12.2213822",
language = "British English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Craig Olson and Soskind, {Yakov G.}",
booktitle = "Photonic Instrumentation Engineering III",
address = "United States",
}