Laser-induced breakdown spectroscopy during laser ablation of cavity structures

R. E. Russo, S. S. Mao, X. Zeng, X. Mao

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Cavity formation is a common phenomenon involved in laser processing of solid materials. Although most previous LIBS investigations have been devoted to laser ablation on flat surfaces, the development of a laser plasma inside cavities is of both fundamental as well as practical significance for repetitive laser processing such as micro machining and chemical analysis. In this paper, we will provide our recent spectroscopic measurements of the temperature and electron number density of laser-induced plasmas in fused silica cavities. The effects of cavity aspect ratio on plasma characteristics will be discussed, in particular, the origin of the measured high temperature and electron number density of laser-induced plasma inside cavity structures.

Original languageBritish English
Title of host publicationICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings
PublisherLaser Institute of America
ISBN (Print)0912035757, 9780912035758
DOIs
StatePublished - 2003
EventICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics - Jacksonville, FL, United States
Duration: 13 Oct 200316 Oct 2003

Publication series

NameICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Conference

ConferenceICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics
Country/TerritoryUnited States
CityJacksonville, FL
Period13/10/0316/10/03

Keywords

  • Ablation
  • Cavity
  • Laser
  • Plasma

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