Issues in emissivity of silicon

S. Abedrabbo; J. C. Hensel; O. H. Gokce; F. M. Tong; B. Sopori; A. T. Fiory; N. M. Ravindra

doi:10.1557/proc-525-95

Issues in emissivity of silicon

S. Abedrabbo
, J. C. Hensel
, O. H. Gokce
, F. M. Tong
, B. Sopori
, A. T. Fiory
, N. M. Ravindra

Physics

New Jersey Institute of Technology

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

The first qualitative results of the effects of backside surface roughness on the radiative properties of silicon as a function of temperature in the wavelength range of 1-20 μm are presented in this study. These measurements have been made utilizing a spectral emissometer operating at near- and mid-IR spectral range. Surface roughness of the silicon wafer has been observed to lead to increased emissivities.

Original language	British English
Pages (from-to)	95-102
Number of pages	8
Journal	Materials Research Society Symposium - Proceedings
Volume	525
DOIs	https://doi.org/10.1557/proc-525-95
State	Published - 1998
Event	Proceedings of the 1998 MRS Spring Symposium - San Francisco, CA, USA Duration: 13 Apr 1998 → 16 Apr 1998

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10.1557/proc-525-95

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title = "Issues in emissivity of silicon",

abstract = "The first qualitative results of the effects of backside surface roughness on the radiative properties of silicon as a function of temperature in the wavelength range of 1-20 μm are presented in this study. These measurements have been made utilizing a spectral emissometer operating at near- and mid-IR spectral range. Surface roughness of the silicon wafer has been observed to lead to increased emissivities.",

author = "S. Abedrabbo and Hensel, \{J. C.\} and Gokce, \{O. H.\} and Tong, \{F. M.\} and B. Sopori and Fiory, \{A. T.\} and Ravindra, \{N. M.\}",

year = "1998",

doi = "10.1557/proc-525-95",

language = "British English",

volume = "525",

pages = "95--102",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1998 MRS Spring Symposium ; Conference date: 13-04-1998 Through 16-04-1998",

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TY - JOUR

T1 - Issues in emissivity of silicon

AU - Abedrabbo, S.

AU - Hensel, J. C.

AU - Gokce, O. H.

AU - Tong, F. M.

AU - Sopori, B.

AU - Fiory, A. T.

AU - Ravindra, N. M.

PY - 1998

Y1 - 1998

N2 - The first qualitative results of the effects of backside surface roughness on the radiative properties of silicon as a function of temperature in the wavelength range of 1-20 μm are presented in this study. These measurements have been made utilizing a spectral emissometer operating at near- and mid-IR spectral range. Surface roughness of the silicon wafer has been observed to lead to increased emissivities.

AB - The first qualitative results of the effects of backside surface roughness on the radiative properties of silicon as a function of temperature in the wavelength range of 1-20 μm are presented in this study. These measurements have been made utilizing a spectral emissometer operating at near- and mid-IR spectral range. Surface roughness of the silicon wafer has been observed to lead to increased emissivities.

UR - https://www.scopus.com/pages/publications/0031621068

U2 - 10.1557/proc-525-95

DO - 10.1557/proc-525-95

M3 - Conference article

AN - SCOPUS:0031621068

SN - 0272-9172

VL - 525

SP - 95

EP - 102

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1998 MRS Spring Symposium

Y2 - 13 April 1998 through 16 April 1998

ER -

Issues in emissivity of silicon

Abstract

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