Influence of nitrogen trifluoride and nitrogen plasma treatment on the formation of hillocks during aluminum induced crystallization of a-Si:H
- A. M. Al-Dhafiri
- , H. A. El-Jammal
- , A. Al-Shariah
- , H. A. Naseem
- , W. D. Brown
- College of Sciences
- Jordan Univ. of Sci./Technology
- University of Arkansas
Research output: Contribution to journal › Article › peer-review
10
Scopus
citations