Impact of post via clean solution on Self Aligned Barrier integrity: Corrosion and Cu/Co galvanic coupling

Carole Pernel, Sabrina Bilouk, Ricardo Perrera Nogueira, Paul Henri Haumesser, Didier Louis, Gérard Passemard

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

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