TY - JOUR
T1 - Highly sensitive and wide-range resonant pressure sensor based on the veering phenomenon
AU - Alcheikh, N.
AU - Hajjaj, A. Z.
AU - Younis, M. I.
N1 - Funding Information:
This research has been supported through King Abdullah University of Science and Technology (KAUST) fund . Nouha Alcheikh received a Master’s degree in electronics from the Polytechnic National Institute of Grenoble in 2007 and her Ph.D. degree in RF MEMS from Grenoble University, France in 2011. From 2011 to 2014, she was as a Post-Doctoral fellow working on Force Sensors and Energy Harvesting at CEA-Leti/MINATEC Campus, Grenoble (France) and at IMS, Bordeaux (France). From 2015 to 2018, she was a Post-Doctoral Fellow at King Abdullah University of Science and Technology (KAUST), Thuwal, Saudi Arabia where she is performing her research on MEMS Sensors and Actuators, and on high-performance stretchable reconfigurable inorganic electronics. She is currently a Research scientist at KAUST. Amal Hajjaj received a B.S. and Master’s degrees in Mechanical Engineering from Tunisia Polytechnic School in 2012 and 2013. She is obtained her PhD degree in Mechanical Engineering from King Abdullah University of Science and Technology (KAUST). She is interested in characterizing theoretically and experimentally the linear and nonlinear dynamics of NEMS and MEMS based resonators with their applications in sensors and actuators. Mohammad I. Younis received a Ph.D. degree in engineering mechanics from Virginia Tech, VA, USA, in 2004. From 2004–2013 he served as an assistant and then as an associate professor of Mechanical Engineering at the State University of New York (SUNY), Binghamton, NY, USA. He is currently a Professor of Mechanical Engineering with King Abdullah University of Science and Technology, Saudi Arabia. He serves as an Associate Editor of Nonlinear Dynamics, the Journal of Computational and Nonlinear Dynamics, Meccanica, and the Journal of Vibration and Control. He is a member of IEEE and the American Society of Mechanical Engineers ASME.
Publisher Copyright:
© 2019
PY - 2019/12/1
Y1 - 2019/12/1
N2 - We report a highly sensitive wide-range resonant pressure sensor. The concept is based on tracking multiple modes of vibration of an electrothermally heated initially curved micro-beam experiencing the veering phenomenon between its first and third vibration modes. For low values of pressure, the third resonance frequency is very sensitive, and thus its variation with pressure is monitored and recorded. As increasing pressure, the resonance frequency of the third mode decreases until reaching the veering phenomenon. At that point, the first mode exchanges role with the third mode, becoming very sensitive, and hence its frequency is tracked afterward as varying pressure. We show that using this concept, the sensitivity of the resonant pressure micro-sensor is significantly enhanced. Finite element method (FEM) simulations and experimental data show that the proposed micro-sensor becomes highly sensitive for wide-range of pressure from 38 mTorr to 200 Torr. The effect of various parameters on the performance of the proposed pressure sensor is investigated including the thickness of the micro-beam, the vacuum chamber size, and the thermal actuation load.
AB - We report a highly sensitive wide-range resonant pressure sensor. The concept is based on tracking multiple modes of vibration of an electrothermally heated initially curved micro-beam experiencing the veering phenomenon between its first and third vibration modes. For low values of pressure, the third resonance frequency is very sensitive, and thus its variation with pressure is monitored and recorded. As increasing pressure, the resonance frequency of the third mode decreases until reaching the veering phenomenon. At that point, the first mode exchanges role with the third mode, becoming very sensitive, and hence its frequency is tracked afterward as varying pressure. We show that using this concept, the sensitivity of the resonant pressure micro-sensor is significantly enhanced. Finite element method (FEM) simulations and experimental data show that the proposed micro-sensor becomes highly sensitive for wide-range of pressure from 38 mTorr to 200 Torr. The effect of various parameters on the performance of the proposed pressure sensor is investigated including the thickness of the micro-beam, the vacuum chamber size, and the thermal actuation load.
KW - Clamped-Clamped microbeam
KW - Electrothermal actuation
KW - Resonant pressure sensor
KW - Two symmetric vibration modes
KW - Veering phenomenon
UR - http://www.scopus.com/inward/record.url?scp=85074153411&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2019.111652
DO - 10.1016/j.sna.2019.111652
M3 - Article
AN - SCOPUS:85074153411
SN - 0924-4247
VL - 300
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
M1 - 111652
ER -