High-Throughput Multi-Plume Pulsed-Laser Deposition for Materials Exploration and Optimization

Samuel S. Mao, Xiaojun Zhang

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

A high-throughput multi-plume pulsed-laser deposition (MPPLD) system has been demonstrated and compared to previous techniques. Whereas most combinatorial pulsed-laser deposition (PLD) systems have focused on achieving thickness uniformity using sequential multilayer deposition and masking followed by post-deposition annealing, MPPLD directly deposits a compositionally varied library of compounds using the directionality of PLD plumes and the resulting spatial variations of deposition rate. This system is more suitable for high-throughput compound thin-film fabrication.

Original languageBritish English
Pages (from-to)367-371
Number of pages5
JournalEngineering
Volume1
Issue number3
DOIs
StatePublished - 1 Sep 2015

Keywords

  • high-throughput
  • pulsed-laser deposition

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