@inproceedings{8ba343bc302540c69a30bd2bf815d87f,
title = "High Performance MEMS Magnetometer for Industrial Applications",
abstract = "This paper presents a high-performance z-Axis Lorentz-force magnetometer based on an in-plane micro-resonator composed of flexural micro-beams connected to a T-shaped structure. The concept is based on tracking the amplitude change (AM) of the first out of plane mode under different magnetic field strengths. Powered at 72 mW, the device demonstrated a measured high sensitivity (S) of 17.19 μm/T that is comparable to the reported magnetometers. Additionally, we demonstrated that operating at AC voltage of 5 V, the power consumption can be reduced by half. These features, combined with, simplicity of fabrication, and low-cost, make the proposed device promising to develop a magnetometer network system for industrial applications.",
keywords = "AM modulation, high sensitivity, in-plane T-shaped resonator, Lorentz-force magnetometer, low-power micro-sensor",
author = "Raed Alahmdi and Usman Yaqoob and Younis, {Mohammad I.} and Nouha Alcheikh",
note = "Publisher Copyright: {\textcopyright} 2023 IEEE.; 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2023 ; Conference date: 11-12-2023 Through 14-12-2023",
year = "2023",
doi = "10.1109/PowerMEMS59329.2023.10417271",
language = "British English",
series = "PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "68--71",
booktitle = "PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications",
address = "United States",
}