High Performance MEMS Magnetometer for Industrial Applications

Raed Alahmdi, Usman Yaqoob, Mohammad I. Younis, Nouha Alcheikh

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    Abstract

    This paper presents a high-performance z-Axis Lorentz-force magnetometer based on an in-plane micro-resonator composed of flexural micro-beams connected to a T-shaped structure. The concept is based on tracking the amplitude change (AM) of the first out of plane mode under different magnetic field strengths. Powered at 72 mW, the device demonstrated a measured high sensitivity (S) of 17.19 μm/T that is comparable to the reported magnetometers. Additionally, we demonstrated that operating at AC voltage of 5 V, the power consumption can be reduced by half. These features, combined with, simplicity of fabrication, and low-cost, make the proposed device promising to develop a magnetometer network system for industrial applications.

    Original languageBritish English
    Title of host publicationPowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages68-71
    Number of pages4
    ISBN (Electronic)9798350344219
    DOIs
    StatePublished - 2023
    Event2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2023 - Abu Dhabi, United Arab Emirates
    Duration: 11 Dec 202314 Dec 2023

    Publication series

    NamePowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

    Conference

    Conference2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2023
    Country/TerritoryUnited Arab Emirates
    CityAbu Dhabi
    Period11/12/2314/12/23

    Keywords

    • AM modulation
    • high sensitivity
    • in-plane T-shaped resonator
    • Lorentz-force magnetometer
    • low-power micro-sensor

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