Abstract
Yttria-stabilized zirconia and cerium dioxide thin films are deposited in oxygen-deficient environments and compared to those deposited in oxygen-rich environments. Oxygen-deficient films are highly (001)-oriented, which corresponds to a surface that should be forbidden based on Tasker's theoretical calculation. Oxygen-vacancy-induced surface reconstruction and relaxation are proposed to explain the phenomenon. The analysis is consistent with preferred orientations previously observed in indium tin oxide, SnO 2, and NiO films. Detailed studies of preferred orientations of these oxygen-deficient metal oxide films are of importance for their use in solid oxide fuel cells, gas sensors, and optical devices, etc.
Original language | British English |
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Article number | 093530 |
Journal | Journal of Applied Physics |
Volume | 111 |
Issue number | 9 |
DOIs | |
State | Published - 1 May 2012 |