Abstract
A process is demonstrated for fabricating microfluidic devices with pre-fabricated microelements embedded within a microchannel orthogonal to the flow. The microelements constitute a functional three-dimensional (3D) structure that can be used for a broad range of applications. The process is demonstrated using PDMS and glass and conventional microfabrication processes. The use of this process for applications of dielectrophoresis and magnetophoresis is discussed.
Original language | British English |
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Pages (from-to) | 27-32 |
Number of pages | 6 |
Journal | Microelectronic Engineering |
Volume | 187-188 |
DOIs | |
State | Published - 5 Feb 2018 |
Keywords
- 3D microelements
- Dielectrophoresis
- Flow invasive microelements
- Magnetophoresis
- Microfabrication