@inproceedings{479a13c46bd940688b4bbb63175038a1,
title = "Fabrication of acoustic microfluidic platforms for particle manipulation",
abstract = "In this paper, a detailed fabrication process of an acoustic microfluidic platform is discussed. The platform consists of a piezoelectric wafer with interdigitated electrode transducers embedded in it. The fabrication process involves micro-patterning the interdigitated transducers using chromium to create surface acoustic waves. The fabrication steps include surface preparation, sputtering, spin coating, lithography, and chemical etching. The paper also includes an experiment in which the fabricated device is tested. Polystyrene particles are suspended in deionized water at a concentration of one million particles per milliliter. A droplet of the solution is placed on the wafer and the response of particles to the surface acoustic wave is investigated using an inverted microscope.",
keywords = "Acoustophoresis, Interdigitated transducers, Lithography, Microfluidics, Photoresist, Polystyrene particles, Surface Acoustic Waves",
author = "Abdulla Al-Ali and Waqas Waheed and Eiyad Abu-Nada and Anas Alazzam",
note = "Funding Information: Acknowledgements This publication is based upon work supported by the Khalifa University of Science and Technology under Award No. [CIRA-2019-014]. Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 Advances in Science and Engineering Technology International Conferences, ASET 2020 ; Conference date: 04-02-2020 Through 09-04-2020",
year = "2020",
month = feb,
doi = "10.1109/ASET48392.2020.9118311",
language = "British English",
series = "2020 Advances in Science and Engineering Technology International Conferences, ASET 2020",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2020 Advances in Science and Engineering Technology International Conferences, ASET 2020",
address = "United States",
}