Fabrication of acoustic microfluidic platforms for particle manipulation

Abdulla Al-Ali, Waqas Waheed, Eiyad Abu-Nada, Anas Alazzam

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

In this paper, a detailed fabrication process of an acoustic microfluidic platform is discussed. The platform consists of a piezoelectric wafer with interdigitated electrode transducers embedded in it. The fabrication process involves micro-patterning the interdigitated transducers using chromium to create surface acoustic waves. The fabrication steps include surface preparation, sputtering, spin coating, lithography, and chemical etching. The paper also includes an experiment in which the fabricated device is tested. Polystyrene particles are suspended in deionized water at a concentration of one million particles per milliliter. A droplet of the solution is placed on the wafer and the response of particles to the surface acoustic wave is investigated using an inverted microscope.

Original languageBritish English
Title of host publication2020 Advances in Science and Engineering Technology International Conferences, ASET 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728146409
DOIs
StatePublished - Feb 2020
Event2020 Advances in Science and Engineering Technology International Conferences, ASET 2020 - Dubai, United Arab Emirates
Duration: 4 Feb 20209 Apr 2020

Publication series

Name2020 Advances in Science and Engineering Technology International Conferences, ASET 2020

Conference

Conference2020 Advances in Science and Engineering Technology International Conferences, ASET 2020
Country/TerritoryUnited Arab Emirates
CityDubai
Period4/02/209/04/20

Keywords

  • Acoustophoresis
  • Interdigitated transducers
  • Lithography
  • Microfluidics
  • Photoresist
  • Polystyrene particles
  • Surface Acoustic Waves

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