@inproceedings{1afa769818684b2f8a187d29e7a00718,
title = "Enhancement of Greenhouse Gas Sensing Performance Using a Heated Micro-Resonator with Lorentz-Forces",
abstract = "This paper presents a novel approach to developing high-performance gas sensors by leveraging electrothermally actuated buckled micro-beams driven by Lorentz forces. Previous straight beam micro-resonator-based gas sensors take advantage of the buckling bifurcation and suffer from low sensitivity with the presence of DC electrostatic voltage. In this work, we used an electromagnetic actuation in order to maximize the slope at both pre/post-buckling and around the buckling point, thereby enhancing the sensitivity of sensor. An analytical model is developed to understand and verify the micro-sensor performance with good agreement reported with the experimental data. The results indicate significant improvements in the slope (sensitivity), power consumption, and driving voltage, providing valuable insights for the design and optimization of gas sensors targeting greenhouse gases.",
keywords = "Clamped-clamped resonator, Electrothermal and electrostatic actuation, Gas sensor, Heating/cooling effect, Lorentz force actuation",
author = "Shalabi, \{Ahmad T.\} and Mbarek, \{Sofiane Ben\} and Ouakad, \{Hassen M.\} and Nouha Alcheikh",
note = "Publisher Copyright: {\textcopyright} 2023 IEEE.; 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2023 ; Conference date: 11-12-2023 Through 14-12-2023",
year = "2023",
doi = "10.1109/PowerMEMS59329.2023.10417156",
language = "British English",
series = "PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "23--26",
booktitle = "PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications",
address = "United States",
}