Electrochemical characterization of vertical arrays of tin nanowires grown on silicon substrates as anode materials for lithium rechargeable microbatteries

Vertical arrays of one-dimensional tin nanowires on silicon dioxide (SiO₂)/silicon (Si) substrates have been developed as anode materials for lithium rechargeable microbatteries. The process is complementary metal-oxide-semiconductor (CMOS) compatible for fabricating on-chip microbatteries. Nanoporous anodized aluminum oxide (AAO) templates integrated on SiO₂/Si substrates were employed for fabrication of tin nanowires resulting in high surface area of anodes. The microstructure of these nanowire arrays was investigated by scanning electron microscopy and X-ray diffraction. The electrochemical tests showed that the discharge capacity of about 400 mA h g^-1 could be maintained after 15 cycles at the high discharge/charge rate of 4200 mA g^-1.