Electrochemical behavior of cobalt in post-via etch cleaning solutions

S. Bilouk, C. Pernel, L. Broussous, V. Ivanova, R. P. Nogueira

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Fingerprint

Dive into the research topics of 'Electrochemical behavior of cobalt in post-via etch cleaning solutions'. Together they form a unique fingerprint.

Engineering

Material Science

Chemical Engineering